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Reference library

CVD Machines

ATL develops, designs & builds all types of CVD reactor. These range in size from experimental tube reactors 50mm in diameter to production reactors up to 2m in diameter.

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All of our machines are available in lab-scale, pilot plant and full production scale. Please contact us to discuss your requirements, our engineers can design the perfect custom reactor for your facility.

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Explore our machines below.

Aluminising Machines

High Temperature Machines

  • Available in isobaric vapour aluminising (IVA) and CVD aluminising variants

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  • Double pumped vacuum furnace

  • Operating temperatures between 900 and 1050°C

  • Pressure range of 1–50 mBar during operation

  • Wet scrubbing system to absorb acid byproducts

  • 500 kg maximum weight of work and fixturing

  • Overhead crane used to remove retort, this can be done whilst hot to reduce cycle times

  • Retort placed in cooling station for loading and unloading

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  • ​Uses flow of aluminium trichloride vapour to convert nickel surface to nickel aluminide​

  • Operating temperatures between 900 and 1160°C

  • Pressure range of 50–300 mBar during operation

  • Vapour stream can coat external surfaces or internal cooling passages

  • Additional dopants can be added

  • Low and high activity aluminides coatings possible

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Isobaric Vapour Aluminising

CVD Aluminising

  • Available gas supplies – MTS, BCl  , NH  , TCS, CH       C  H  , Ar, N  , H

  • Possible coatings – SiC, BN, Si-BN, Si  N  , PyC, B    C

  • Maximum temperatures up to 2200°C

  • Pressure range of 1–1000 mBar

  • Wet scrubbing system to absorb acid byproducts

  • System supplied with graphite chamber and furnace, supporting steelwork, gas supply system, vacuum pumps and control system

  • Rotating platform available

  • Top- or bottom-loading variants available​​

  • Customisable to specific requirements

  • Available with add on chlorinator module, for deposition of transition metals and their carbides (e.g. TaC) through use of their chloride gases​

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Transform your CVD facility

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