CVD has many industrial applications ranging from wear resistant coatings on steel tools to free-standing ceramic components. It can be used with elements and compounds right across the periodic table. Some examples are:
TiN/TiC/Al2O3 – Wear resistant coatings on steel and carbide tools.SiC – Protection of graphite parts in semiconductor processing and aerospace applications.Si3N4 – High purity layers for crystal growing; surface improvement for ceramic engine parts.(amorphic or oc)BN (hexagonal) – Free standing crucibles and boats for GaAs production. Al/Cr – Diffusion aluminising and and chromising for nickel superalloy gas turbine parts. ZnS/Se– Infra-red transmission meterial. C (as graphite) – High temperature parts for electron tubes and atomic absorption spectrometers. C (as carbon) – Carbon-carbon fibre composites for brake discs. SiC – SiC-carbon-carbon fibre composites for rotating seals GaAs – Doped epitaxial layers. C (diamond like) – Potential wear resistant coating; potential heat sink material in semiconductor devices. Si3N4 (amorphous) – Passive layers for semiconductor encapsulation. W – Sputter resistant material for fusion power and semiconductor applications. W2C/W3C – Wear resistant coatings for extrusion dies and rock drilling.
